Instrument

DEKTAK 8 Advanced Developm ent® profiler (Veeco)


DISCIPLINES

CONDITION

Suitable

ADDITIONAL INFO

Dektak 8 contact mode stylus profiler performs 2D or 3D mapping of various surfaces with nanometer- scale precision. On the basis of the topographical measurements, the surface curvature,
roughness, the height/volume of specific surface structures, the thicknesses of thin films (on masked edges) can be determined.

Technical Specifications:
Scan Length Range: 50μm – 5mm
Scan Speed Range: 3 – 200 s
Sampling Rate: 300 data points/s
Vertical Range: 50Å – 262μm
Vertical Resolution (at various ranges): 1Å/6,55μm; 10Å/65,5 μm; 40Å/262μm
Stylus Tracking Force: 1 – 15 mg
Stylus Radius Options: 0,2μm; 2,5μm; 5,0μm
Sample Size (max.): 200mm × 200mm × 25,4mm
Sample Stage Rotation: 360°
Sensor Position Translation: 200mm
(along x and y axis)

Options and Accessories
Dektak software (Microsoft® Windows XP®): interactive data acquisition
Vision®32 software: data processing, 2-D and 3-D image analysis
Single scan and fully automated multiple scan (>1000 scans) options
Calibration standards
Vibration isolation table with compressor

CONTACT

Dr. Kopniczky Judit
+3662544421