Manufacturer: Veeco

Stylus profiler, available tip radius: 0.2 µm, 2.5 µm and 5 µm;

-max. sample height: 25 mm;

-line scan length: 50 µm - 50 mm; lateral resolution: 33nm;

-highest vertical measurement range 260 µm;

-vertical resolution: 1 Å/6.5 µm, 40 Å/260 µm;

-stylus force: 1-15 mg;

-3D scanning option,  smallest lateral (interline) step: 3.15 µm