Instrument
Excimer laser, LLG TWINAMP
DISCIPLINES
ORGANISATIONS
CONDITION
Suitable
YEAR
2003.
ADDITIONAL INFO
Manufacturer: Laser-Laboratorien Göttingev e.V.
Double head excimer laser operating with ArF and KrF gas filling
50 Hz Maximum repetition rate
ArF: 193 nm wavelength, 20 ns pulse length, max. 150 mJ pulse energy
KrF: 248 nm wavelength, 18 nm pulse legth, max. 250mJ pulse energy
CONTACT
Dr. Hopp Béla
AS04
(62)-544657